Me ka hoʻomau ʻana o ka hoʻomohala ʻana o nā kaʻa kaʻa hoʻohui nui, ʻoi aku ka paʻakikī o ke kaʻina hana chip, a ʻo ka microstructure abnormal a me ka hoʻohui ʻana o nā mea semiconductor ke keʻakeʻa nei i ka hoʻomaikaʻi ʻana o ka hua chip, e lawe mai ana i nā pilikia nui i ka hoʻokō ʻana i ka semiconductor hou a hoʻohui pū ʻia. ʻenehana kaapuni.
Hāʻawi ʻo GRGTEST i ka nānā ʻana a me ka loiloi semiconductor material microstructure a me ka loiloi e kōkua i nā mea kūʻai aku e hoʻomaikaʻi i nā kaʻina semiconductor a me nā kaʻina kaʻapuni i hoʻohui ʻia, me ka hoʻomākaukau ʻana i ka ʻaoʻao pae wafer a me ka nānā ʻana uila, ka loiloi piha ʻana o nā waiwai kino a me nā kemika o nā mea e pili ana i ka hana semiconductor, ka hoʻokumu ʻana a me ka hoʻokō ʻana i ka nānā ʻana i nā mea haumia semiconductor. papahana.
ʻO nā mea semiconductor, nā mea mole liʻiliʻi liʻiliʻi, nā mea polymer, nā mea hoʻolalelaʻi / ʻole, nā mea metala ʻole.
1. ʻO ka hoʻomākaukau ʻana o ka chip wafer level profile a me ka loiloi uila, e pili ana i ka ʻenehana ion beam (DB-FIB), ka ʻoki pololei ʻana o ka wahi kūloko o ka chip, a me ke kiʻi uila i ka manawa maoli, hiki ke loaʻa i ke ʻano o ka chip profile, haku a me nā mea ʻē aʻe. ʻike kaʻina hana nui;
2. Ka nānā 'ana i nā waiwai kino a me nā kemika o nā mea hana semiconductor, e like me nā mea polymer organik, nā mea mole li'ili'i, nā mea ho'omeamea 'ole-metallic haku mele 'ana, ka molecular structure analysis, etc.;
3. Ka hoʻokumu ʻana a me ka hoʻokō ʻana i ka hoʻolālā loiloi contaminant no nā mea semiconductor.Hiki iā ia ke kōkua i ka poʻe kūʻai aku e hoʻomaopopo piha i nā ʻano kino a me nā kemika o nā mea haumia, e like me: ka nānā ʻana i ka haku mele, ka nānā ʻana i nā ʻāpana, ka nānā ʻana i ka molecular structure a me nā ʻano ʻano kino a me nā ʻano kemika.
lawelaweʻano ʻano | lawelawemau mea |
Ka nānā 'ana i ka haku mele 'ana o nā mea semiconductor | l EDS mea hoʻonaʻauao, l X-ray photoelectron spectroscopy (XPS). |
ʻO ka nānā ʻana i ka hoʻolālā molekula o nā mea semiconductor | l FT-IR ka nānā 'ana i ka spectrum infrared, l X-ray diffraction (XRD) anana spectroscopic, l Hoʻopāpā hoʻopaneʻe nuklea nuklea (H1NMR, C13NMR) |
ʻIkepili microstructure o nā mea semiconductor | l ka nānā ʻana i ka ʻāpana ion beam (DBFIB), l Ua hoʻohana ʻia ke kahua emission scanning electron microscopy (FESEM) e ana a nānā i ka microscopic morphology, l ʻAtomic force microscopy (AFM) no ka nānā ʻana i ka morphology surface |